同步輻射X射線衍射法實(shí)現(xiàn)氮化鎵襯底及同質(zhì)外延薄膜晶格面傾斜可視化 Synchrotron x-ray diffraction-based visualization of lattice-plane tilting of a GaN substrate and epitaxial film坂田修身日本國立材料研究所SPring-8 BL15XU線站站長，東京工業(yè)大學(xué)兼職教授 Osami SAKATAStation Director of the Synchrotron X-ray Station at SPring-8 and the Group Leaders of the Synchrotron X-ray group and the Synchrotron X-ray